Ownership Submission
FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  Goodman John B
 2. Date of Event Requiring Statement (Month/Day/Year)
03/22/2005		 3. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ENTG]
(Last)
(First)
(Middle)
3500 LYMAN BLVD		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Sr. VP, Mgng Dir-Fuel Cells
 5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

CHASKA, MN 55318		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 117,124 (1)
D
 
Common Stock 70,493
I
by Family Members
Common Stock 118,879
I
by ESOP

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Stock Option (Right to Buy) 07/11/2001(2) 07/11/2010 Common Stock 300 $ 11 D  
Stock Option (Right to Buy) 09/18/2001(2) 09/18/2010 Common Stock 20,000 $ 9.63 D  
Stock Option (Right to Buy) 11/27/2001(2) 11/27/2010 Common Stock 40,000 $ 8.38 D  
Stock Option (Right to Buy) 09/17/2002(3) 10/15/2011 Common Stock 60,000 $ 8.04 D  
Stock Option (Right to Buy) 10/15/2003(4) 10/15/2012 Common Stock 47,500 $ 5.9 D  
Stock Option (Right to Buy) 10/22/2004(2) 10/22/2013 Common Stock 22,500 $ 11.96 D  
Stock Option (Right to Buy) 10/15/2005(5) 10/15/2014 Common Stock 31,000 $ 8.37 D  

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
Goodman John B
3500 LYMAN BLVD
CHASKA, MN 55318		       Sr. VP, Mgng Dir-Fuel Cells  

Signatures

By: /s/ Lori Cameron, Attorney-in-Fact for John B Goodman 03/29/2005
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) 13,386 of these shares are subject to a restricted stock grant which vests in four annual installments and are subject to certain restrictions such as continued employment.
(2) This option is fully vested.
(3) 45,000 shares are exercisable, the remaining 15,000 shares will become exercisable on September 17, 2005.
(4) 15,000 shares are exercisable, an additional 16,250 shares will become exercisable on each October 15, 2005, and 2006.
(5) This option will become exercisable with respect to 25% of the shares on each April 15, 2005, October 15, 2005, April 15, 2006, and October 15, 2006.

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