UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                  SCHEDULE 14A

      PROXY STATEMENT PURSUANT TO SECTION 14(A) OF THE SECURITIES EXCHANGE
                         ACT OF 1934 (AMENDMENT NO. __)

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    Rule 14a-6(e)(2))

[ ] Definitive Additional Materials

[ ] Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12


                            NANOMETRICS INCORPORATED
           ----------------------------------------------------------
                (Name of Registrant as Specified in its Charter)

           ----------------------------------------------------------
     (Name of Person(s) Filing Proxy Statement if other than the Registrant)

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                  applies:

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    Rule  0-11(a)(2)  and identify the filing for which the  offsetting  fee was
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                           NANOMETRICS INCORPORATED

                   NOTICE OF ANNUAL MEETING OF SHAREHOLDERS

TO THE SHAREHOLDERS:

     NOTICE  IS  HEREBY  GIVEN  that  the  Annual  Meeting  of  Shareholders  of
Nanometrics  Incorporated,  a  California  corporation  (the "Company"), will be
held  on  Wednesday,  May  26,  2004  at 1:30 p.m., local time, at the principal
offices  of  the  Company  located  at  1550 Buckeye Drive, Milpitas, California
95035, for the following purposes:

       1. To  elect  seven  directors  to serve until the next Annual Meeting of
          Shareholders or until their successors are elected.

       2. To  ratify  the  appointment  of  Deloitte & Touche LLP as independent
        auditors of the Company for the fiscal year ending January 1, 2005.

       3. To  transact  such  other  business  as  may  properly come before the
          meeting or any adjournment thereof.

     The  foregoing  items  of  business  are  more fully described in the Proxy
Statement accompanying this Notice.

     Only  shareholders  of record at the close of business on April 5, 2004 are
entitled to notice of and to vote at the meeting and any adjournment thereof.

     All  shareholders  are  cordially  invited to attend the meeting in person.
However,  to  ensure  your representation at the meeting, you are urged to mark,
sign,  date  and  return  the enclosed proxy card as promptly as possible in the
postage-prepaid  envelope  enclosed  for that purpose. Any shareholder attending
the meeting may vote in person even if such shareholder returned a proxy.


                                        Sincerely,
                                        Vincent J. Coates
                                        Secretary

Milpitas, California
April 23, 2004


                           NANOMETRICS INCORPORATED

                                PROXY STATEMENT
                INFORMATION CONCERNING SOLICITATION AND VOTING

General

     The  enclosed  proxy  is  solicited  on behalf of the Board of Directors of
Nanometrics  Incorporated  (the  "Company")  for  use  at  the Annual Meeting of
Shareholders  of the Company (the "Annual Meeting") to be held on Wednesday, May
26,  2004  at  1:30  p.m.,  local  time,  or at any adjournment thereof, for the
purposes  set  forth  herein and in the accompanying Notice of Annual Meeting of
Shareholders.  The  Annual  Meeting will be held at the principal offices of the
Company   located  at  1550  Buckeye  Drive,  Milpitas,  California  95035.  The
Company's telephone number at that address is (408) 435-9600.

     These  proxy  solicitation materials were mailed on or about April 23, 2004
to  all  shareholders  entitled  to vote at the meeting. A copy of the Company's
2003  Annual Report on Form 10-K accompanies this Proxy Statement. The Company's
2003  Annual  Report on Form 10-K is also available on the Security and Exchange
Commission's website at www.sec.gov.

Record Date and Shares Outstanding

     Shareholders  of  record  at  the  close  of business on April 5, 2004 (the
"Record  Date")  are  entitled  to  notice of and to vote at the meeting. At the
Record  Date,  12,207,277  shares  of  common stock of the Company, no par value
(the  "Common  Stock"),  were issued and outstanding. For information concerning
security  ownership  of  management and beneficial owners of more than 5% of the
outstanding  Common  Stock,  see  "Security  Ownership of Management and Certain
Beneficial Owners" below.

Revocability of Proxies

     Any  proxy given pursuant to this solicitation may be revoked by the person
giving  it  at any time before its use by (i) delivering to the Secretary of the
Company  a written notice of revocation or a duly executed proxy bearing a later
date or (ii) attending the meeting and voting in person.

Voting and Solicitation

     The  candidates  receiving the seven highest vote totals will be elected to
serve  as  directors. Every shareholder voting for the election of directors may
(i)  cumulate  such shareholder's votes and give one candidate a number of votes
equal  to  the  number  of  directors  to be elected multiplied by the number of
shares  that  such shareholder holds or (ii) distribute such shareholder's votes
on  the  same  principle among as many candidates as the shareholder may select,
provided  that  votes cannot be cast for more than seven candidates. However, no
shareholder  shall  be  entitled  to  cumulate  votes for a candidate unless the
candidate's  name  has  been  placed  in  nomination prior to the voting and the
shareholder,  or any other shareholder, has given notice at the meeting prior to
the  voting of the intention to cumulate votes. On all other matters, each share
of Common Stock outstanding has one vote.

     The  cost  of  this solicitation will be borne by the Company. In addition,
the  Company  may  reimburse  brokerage  firms  and  other  persons representing
beneficial  owners  of  shares  for  their  expenses  in forwarding solicitation
material  to such beneficial owners. Proxies may also be solicited by certain of
the  Company's  directors,  officers  and  regular employees, without additional
compensation, personally or by telephone.

                                       1


Quorum; Abstentions; Broker Non-Votes

     The  required  quorum for the transaction of business at the Annual Meeting
is  a  majority  of  the  shares  of  Common Stock issued and outstanding on the
Record  Date. Shares that are voted "FOR," "AGAINST" or "WITHHELD FROM" a matter
are  treated  as  being  present  at  the meeting for purposes of establishing a
quorum  and  are  also  treated as shares "represented and voting" at the Annual
Meeting ("Votes Cast") with respect to such matter.

     While  there is no definitive statutory or case law authority in California
as   to   the  proper  treatment  of  abstentions,  the  Company  believes  that
abstentions  should be counted for purposes of determining both (i) the presence
or  absence  of  a  quorum  for  the  transaction of business and (ii) the total
number  of  Votes Cast with respect to a proposal. In the absence of controlling
precedent  to  the  contrary,  the  Company intends to treat abstentions in this
manner.  Accordingly,  abstentions will have the same effect as a vote against a
proposal.

     Broker  non-votes  will be counted for purposes of determining the presence
or  absence of a quorum for the transaction of business, but will not be counted
for  purposes  of  determining  the  number  of  Votes  Cast  with  respect to a
proposal.

Deadline for Receipt of Shareholder Proposals

     The  attached  proxy  card grants the proxy holders discretionary authority
to  vote  on  any  matter  raised  at  the 2004 Annual Meeting. Shareholders are
entitled  to  present  proposals  for  action at the 2005 Annual Meeting if such
proposals  comply  with  the  requirements  of  the  proxy  rules.  Proposals of
shareholders  of  the  Company  which  are  intended  to  be  presented  by such
shareholders  at  the  Company's  2005  Annual  Meeting  must be received by the
Company  no  later  than December 18, 2004 in order that they may be included in
the proxy statement and form of proxy relating to that meeting.

     If  a  shareholder  intends to submit a proposal at the 2005 Annual Meeting
that  is  not  intended  to  be  included  in the proxy statement and proxy, the
shareholder  must  do so no later than March 3, 2005. The proxy holders will not
be  allowed  to  use  their  discretionary  authority  to  vote on any proposals
received  after  this  date  when  such  proposals are raised at the 2005 Annual
Meeting.

Matters Not Required to be Submitted to Security Holders

     The  Company  is submitting to the shareholders the proposal to approve the
appointment  of Deloitte & Touche LLP as independent auditors of the Company for
the  fiscal year ending January 1, 2005. Although the Company is not required to
submit  such  proposal to a vote of the shareholders, the Company has done so in
order  to  obtain  shareholder ratification of the proposal. If the shareholders
do  not  vote  in favor of the appointment of Deloitte & Touche LLP, the Company
will consider the selection of other auditors.

Material Proceedings

     To  the  best  of management's knowledge, there are no material proceedings
to  which  any  director or officer is a party and (i) is adverse to the Company
or  any  of  its  subsidiaries  or  (ii)  has a material interest adverse to the
Company or any of its subsidiaries.

                                       2


                                PROPOSAL NO. 1

                             ELECTION OF DIRECTORS

Nominees

     A  board  of seven directors is to be elected at the Annual Meeting. Unless
otherwise  instructed,  the proxy holders will vote the proxies received by them
for  the  Company's  seven  nominees  named  below,  each of whom is presently a
director  of the Company. In the event that any nominee of the Company is unable
or  declines  to  serve  as  a  director  at the time of the Annual Meeting, the
proxies  will  be  voted  for any nominee who shall be designated by the present
Board  of  Directors  to  fill the vacancy. The proxy holders intend to vote all
proxies  received  by  them  in  such a manner and in accordance with cumulative
voting  as  will  ensure the election of as many of the nominees listed below as
possible  and,  in  such  event,  the  specific nominees to be voted for will be
determined  by  the  proxy  holders. The Company is not aware of any nominee who
will  be  unable  or  will decline to serve as a director. The term of office of
each  person  elected  as a director will continue until the next Annual Meeting
of  Shareholders  or  until  such  director's  successor  has  been  elected and
qualified.

     The  names of the nominees and certain information about them are set forth
below:

  Name of Nominee                        Age     Director Since
  -----------------------------------   -----   ---------------
  Vincent J. Coates .................    79          1975
  John D. Heaton ....................    44          1995
  Edmond R. Ward ....................    64          1999
  William G. Oldham .................    65          2000
  Stephen J Smith ...................    57       April 2004
  Mircea V. Dusa ....................    55       April 2004
  J. Thomas Bentley .................    54       April 2004

     Vincent  J.  Coates  has  been  Chairman of the Board since the Company was
founded  in  1975.  He  has been the Company's Secretary since February 1989. He
also  served  as  Chief  Executive Officer through April 1998 and President from
the  Company's  founding  through  May  1996, except for the period January 1986
through  February  1987  when  he served exclusively as Chief Executive Officer.
Mr.  Coates  has also served as Chairman of the Board of Nanometrics Japan Ltd.,
a  subsidiary of the Company, since its inception in November 1984. Prior to his
employment  at  Nanometrics,  Mr. Coates co-founded Coates and Welter Instrument
Corporation,  a  designer  of  electron  microscopes,  the  assets of which were
subsequently  acquired  by  Nanometrics. Mr. Coates also spent over twenty years
working  in engineering, sales and international operations for the Perkin-Elmer
Corporation,  a  manufacturer of analytical instruments. In 1995, he received an
award  which  recognized his contribution to the industry from Semiconductor and
Equipment and Materials International, an industry trade organization.

     John  D.  Heaton  has  served as a director of the Company since July 1995.
Since  April  1998, he has been Chief Executive Officer of the Company. From May
1996  to  April  1998,  he served as the Company's President and Chief Operating
Officer.  Mr.  Heaton  has also served as President of Nanometrics Japan Ltd., a
subsidiary  of  the  Company,  since January 1998. Beginning in 1978, Mr. Heaton
served   in   various   technical   positions   at   National  Semiconductor,  a
semiconductor manufacturer, prior to joining the Company in 1990.

     Edmond  R.  Ward  has  served as a director of the Company since July 1999.
Beginning  in  January  2002,  Mr. Ward has served as Chief Technical Officer of
Unity  Semiconductor,  a  semiconductor  design and manufacturing company. Since
April  1999,  Mr. Ward has been a General Partner of Virtual Founders, a venture
capital  firm.  From April 1992 to June 1997, Mr. Ward was the Vice President of
Technology  at  Silicon  Valley  Group,  Inc.,  a  supplier  of wafer processing
equipment.

                                       3


     William G. Oldham has served as a director of the Company  since June 2000.
Since  1964,  Mr.  Oldham  has  been  a  faculty  member  at the  University  of
California,  Berkeley,  where he researches  EUV and Maskless  Lithography  and,
since 1996, has been the Director of the DARPA/SRC Research Network for Advanced
Lithography.  He has served as a  consultant  in various  intellectual  property
matters and serves on the board of directors of Cymer, Inc., a supplier of light
sources  for  deep  ultraviolet  (DUV)  photolithography  systems  used  in  the
manufacturing of semiconductors.

     Stephen J Smith is a Professor in the  Department of Molecular and Cellular
Physiology at the Stanford  University School of Medicine.  Dr. Smith's research
addresses brain  development and function with special  interests in the dynamic
and structural aspects of synapse and circuit formation and synaptic plasticity.
Dr. Smith is the author of numerous  research articles in the fields of cellular
and molecular neuroscience. Dr. Smith was appointed to the Board of Directors to
fill a vacancy on April 14, 2004.

     Mircea V. Dusa is an Executive Staff Scientist and a founding member of the
ASML  Technology  Development  Center for  exploratory  research and development
where he has been an ASML Fellow since 2003.  From 1995 to 1999,  he served as a
member of the technical staff and was manager of the Advanced  Lithography Group
at National  Semiconductor.  Prior to 1995, Dr. Dusa served in various technical
positions in lithography and metrology both in the United States and Europe.  He
is the author of over 100  technical  articles  and papers and holds a Ph.D.  in
Applied Optics from the  University of Bucharest.  Dr. Dusa was appointed to the
Board to fill a vacancy on April 14, 2004.

     J. Thomas  Bentley was a co-founder of Alliant  Partners,  a leading merger
and acquisition firm for emerging and mid-market  technology firms. For the past
10 years, Mr. Bentley has worked with some of Alliant's largest clients on their
strategic acquisitions and divestitures.  His expertise is in financial, tax and
accounting  structuring  of merger  transactions.  Mr. Bentley holds a Master of
Science  degree in  Management  from  M.I.T.  and  currently  serves as a senior
advisor to Alliant Partners. Mr. Bentley was appointed to the Board of Directors
to fill a vacancy on the Board on April 14, 2004.

     THE  BOARD  OF  DIRECTORS UNANIMOUSLY RECOMMENDS THAT THE SHAREHOLDERS VOTE
"FOR" THE NOMINEES SET FORTH HEREIN.

                                       4


        Security Ownership of Management and Certain Beneficial Owners

     The  following table sets forth beneficial ownership of Common Stock of the
Company  as  of April 5, 2004, by each director or nominee, by each of the Named
Officers  (as  defined  below),  by all directors and Named Officers as a group,
and  by  all  persons  known  to the Company to be the beneficial owners of more
than  5%  of the Company's Common Stock. Unless otherwise indicated, the address
of  each  beneficial  owner  of 5% of the Company's Common Stock is 1550 Buckeye
Drive, Milpitas, California 95035.


                                                                          Number of Shares of
                                                                              Common Stock         Percent of
                       Name of Beneficial Owner                          Beneficially Owned(1)       Total
---------------------------------------------------------------------   -----------------------   -----------
                                                                                                
Vincent J. Coates(2) ................................................          3,376,274              27.7%
Artemis Investment Management LLC(3) ................................            881,800               7.2%
 437 Madison Avenue
 New York, NY 10022

Capital Group International, Inc.(4) ................................            858,040               7.0%
 11100 Santa Monica Blvd
 Los Angeles, CA 90025

Wasatch Advisors, Inc.(5) ...........................................            702,270               5.8%
 150 Social Hall Avenue
 Salt Lake City, UT 84111

Dimensional Fund Advisors Inc.(6) ...................................            660,012               5.4%
 1299 Ocean Avenue
 11th Floor
 Santa Monica, CA 90401

John D. Heaton(7) ...................................................             93,335                 *

Edmond R. Ward(8) ...................................................             55,400                 *

William Oldham(9) ...................................................             51,000                 *

Paul B. Nolan(10) ...................................................             31,666                 *

Roger Ingalls, Jr. ..................................................              9,000                 *

Stephen J Smith .....................................................                 --                 *

J. Thomas Bentley ...................................................                 --                 *

Mircea V. Dusa ......................................................                 --                 *

All Named Officers and directors as a group (9 persons)(11) .........          3,616,675              29.2%

------------
 *  Represents less than 1% of outstanding shares of Common Stock.
 (1) Beneficial  ownership  is  determined  in  accordance with the rules of the
     Securities  and  Exchange  Commission  (the  "SEC").  The  number of shares
     beneficially  owned  by a person includes shares of common stock subject to
     options  held  by that person that are currently exercisable or exercisable
     within  60  days  of  April  5, 2004. Such shares issuable pursuant to such
     options  are  deemed  outstanding for computing the percentage ownership of
     the  person  holding  such  options  but are not deemed outstanding for the
     purposes of computing the percentage ownership of each other person.

 (2) Includes  3,376,154 shares of common stock held of record by the Vincent J.
     Coates  Separate  Property Trust, U/D/T dated August 7, 1981, for which Mr.
     Coates acts as trustee.

 (3) According  to a Schedule 13G filed on February 10, 2004, Artemis Investment
     Management  LLC  may be deemed to be the beneficial owner of 881,800 shares
     of common stock.

 (4) According  to  a  Schedule  13G/A filed on February 10, 2004, Capital Group
     International,  Inc.  may  be  deemed to be the beneficial owner of 858,040
     shares of common stock.

 (5) According  to  a  Schedule  13G/A  filed with the SEC on February 17, 2004,
     Wasatch  Advisors, Inc. may be deemed to be the beneficial owner of 702,270
     shares of common stock.

 (6) According  to  a  Schedule  13G filed on February 6, 2004, Dimensional Fund
     Advisors  Inc.  may  be deemed to be the beneficial owner of 660,012 shares
     of common stock.

                                       5


 (7) Includes   50,000   shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of April 5, 2004.

 (8) Includes   53,400   shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of April 5, 2004.

 (9) Includes   50,000   shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of April 5, 2004.

(10) Includes   26,666   shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of April 5, 2004.

(11) Includes   180,066  shares  of  common  stock  issuable  upon  exercise  of
     outstanding options exercisable within 60 days of April 5, 2004.

Board Meetings and Committees

     The  Board of Directors held meetings (or acted by written consent) a total
of  four  times  during  fiscal 2003. During fiscal 2003, no incumbent directors
attended  less  than 75% of the aggregate of (i) the total number of meetings of
the  Board  of Directors and (ii) the total number of meetings of committees, if
any,   upon   which  such  directors  served.  The  Company  maintains  standing
committees   overseeing  audits,  nominations,  compensation  and  stock  option
grants.

     Audit  Committee. The Audit Committee of the Board of Directors reviews and
monitors  the corporate financial reporting as well as the internal and external
audits  of  the  Company,  including  among other things, the Company's internal
audit  and  control  functions,  the  results  and scope of the annual audit and
other   services  provided  by  the  Company's  independent  auditors,  and  the
Company's  compliance  with  legal matters that may have a significant impact on
the  Company's  financial  reports.  In  addition,  the  Audit Committee has the
responsibility  to  consider  and recommend the employment of, and to review fee
arrangements  with, the Company's independent auditors. The Audit Committee also
monitors  transactions  between  the  Company  and  its  officers, directors and
employees  for  any potential conflicts of interest. The Audit Committee met (or
acted by written consent) eight times during fiscal 2003.

     The  members of the Audit Committee during fiscal 2003 were William Oldham,
Nathaniel  Brenner  and  Edmond  R.  Ward.  Mr.  Brenner,  the Audit Committee's
financial  expert  in  fiscal 2003, resigned his position as director as well as
his  committee  assignments  effective  as  of  March 2004. The Board expects to
appoint  J.  Thomas  Bentley  to  the  Audit  Committee  at  its  next regularly
scheduled  meeting.  Mr.  Bentley  is  also  expected  to  serve  as  the  Audit
Committee's financial expert.

     Currently,  Mr. Ward is the Chairman of the Audit Committee. Each member of
the  Company's  Audit  Committee  is  an  "independent director" as that term is
defined  under  the  applicable  National  Association  of  Securities  Dealers'
("NASD")  listing  standards.  The Audit Committee has adopted a written charter
which is attached hereto.

     Compensation/Stock   Option   Committee. The   Compensation/Stock   Option
Committee,   reviews  and  makes  recommendations  to  the  Board  of  Directors
regarding  the Company's compensation policy and all forms of compensation to be
provided  to  certain  of  the  executive officers of the Company, including the
Chief Executive Officer.

     The  Compensation/Stock  Option  Committee is responsible for approving the
grant  of  stock  options  to  the  Company's employees under the Company's 2000
Employee Stock Option Plan and 2002 Nonstatutory Stock Option Plan.

     The  members  of  the Compensation/Stock Option Committee serving in fiscal
2003  were  Nathaniel Brenner and Edmond Ward. Mr. Brenner resigned his position
as  director  as  well  as his committee assignments effective as of March 2004.
The  Compensation/Stock Option Committee met (or acted by written consent) eight
times  during  fiscal  2003. The Compensation/Stock Option Committee has not yet
adopted a written charter.

                                       6


     Nominating   Committee.   The   Company  maintains  a  standing  Nominating
Committee  that  assists  the  Board  of Directors in identifying and qualifying
candidates  to  join  the  Board. The Nominating Committee utilizes a variety of
methods  for  identifying  and  evaluating  nominees.  Its  general policy is to
assess  the appropriate size of the Board of Directors and whether any vacancies
are  expected  due  to  retirement or otherwise. In the event that vacancies are
anticipated,   or  otherwise  arise,  the  Nominating  Committee  will  consider
recommending  various  potential  candidates  to fill such vacancies. Candidates
may  come  to  the  attention  of  the  Nominating Committee through its current
members,  shareholders  or  other  persons.  The Board of Directors may consider
properly  submitted  shareholder  nominations  for  candidacy.  Nominees  may be
submitted  by  shareholders  in  accordance  with  our Stockholder Communication
Policy described below.

     The  Nominating  Committee  has  no  specific,  minimum  qualifications for
director   candidates.   In  general,  however,  persons  considered  for  Board
positions  must  have demonstrated leadership capabilities, be of sound mind and
high  moral  character,  have  no  personal  or  financial  interest  that would
conflict  or appear to conflict with the interests of the company and be willing
and able to commit the necessary time for Board and committee service.

     The  Nominating  Committee  believes  that Board members should represent a
balance  of  diverse  backgrounds  and skills, including for example, marketing,
finance,  manufacturing, engineering, science, and international experience. The
Nominating  Committee  presently consists of Edmond Ward and William Oldham. The
Nominating  Committee  did  not  meet  in  fiscal 2003 and has not yet adopted a
written charter.

     The  Company  does  not  maintain  a Corporate Governance Committee at this
time,  but the Board may consider forming such a Committee at its next regularly
scheduled meeting of the Board of Directors.

Shareholder Communication Policy

     The  Company's  Board of Directors has not established a formal process for
shareholders  to  send communications to the Board of Directors or to individual
Directors.  However, the names of all Directors are available to shareholders in
this  proxy  statement.  If  the  Company receives any shareholder communication
intended  for  the  full  Board  of  Directors  or  any individual Director, the
Company  will  forward  the  communication to the full Board of Directors or the
individual  Director,  unless the communication is clearly of a marketing nature
or  is unduly hostile, threatening, illegal or similarly inappropriate, in which
case  the  Company  has  the  authority  to  discard  the communications or take
appropriate legal action regarding the communication.

Compensation/Stock Option Committee Interlocks and Insider Participation

     No  member  of  the  Compensation/Stock  Option  Committee of the Company's
Board  of Directors serves as a member of the board of directors or compensation
committee  of  any  entity  that has one or more executive officers serving as a
member  of  the  Company's  Board  of  Directors  or  Compensation/Stock  Option
Committee.

Board Compensation

     Directors  who  are  not  also  employees  of the Company receive an annual
retainer  fee  of  $5,000  plus $1,000 for each Board of Directors and committee
meeting  attended  (unless  the  Board  of Directors and committee meetings take
place  on  the  same day, in which case such directors receive a $1,000 fee) and
also  $500  for attending quarterly earnings release conference calls. Directors
are  also  eligible to participate in the Company's 2000 Directors' Stock Option
Plan.  Each  Audit  Committee  member  also receives an additional $3,000 annual
retainer,  and  the  Audit  Committee  chairman  receives  an incremental $2,000
retainer for serving in such capacity.

                                       7


Compensation of Executive Officers

     The  following table sets forth the compensation paid by the Company during
the  past  three  fiscal years to (i) the Chief Executive Officer of the Company
during  the  last  fiscal  year,  (ii)  each of the four most highly compensated
executive  officers  (or such lesser number of executive officers as the Company
may  have) of the Company not serving as Chief Executive Officer and (iii) up to
an  additional two individuals that would have been included under item (ii) but
for  the fact that the individuals were not serving as executive officers at the
end of the last completed fiscal year (collectively, the "Named Officers"):

                          Summary Compensation Table



                                                                                           Long Term
                                                                                          Compensation
                                                        Annual Compensation                  Awards
                                              ----------------------------------------   -------------
                                                                                           Securities
                                                                                           Underlying
                    Name                       Fiscal Year       Salary        Bonus      Options (#)
-------------------------------------------   -------------   ------------   ---------   -------------
                                                                                
John D. Heaton ............................       2003         $ 342,800      $    --        572,500
 President and Chief Executive Officer            2002           343,800           --        275,000
                                                  2001           344,299       46,551             --

Vincent J. Coates .........................       2003         $ 204,800      $    --             --
 Chairman of the Board and Secretary              2002           204,800           --             --
                                                  2001           204,800           --             --

Roger Ingalls Jr. .........................       2003         $ 198,965      $    --         31,500
 Vice President of Sales                          2002           201,834           --         25,000
                                                  2001           234,089       19,802             --

Paul B. Nolan .............................       2003         $ 179,050      $    --             --
 Vice President and Chief Financial Officer       2002           162,234           --         50,000
                                                  2001           152,561       18,480             --


Stock Options Granted in the Fiscal Year Ended January 3, 2004

     The  following  table  sets forth information with respect to stock options
granted  during  the  fiscal  year  ended  January  3, 2004 to each of the Named
Officers. All options were granted under the Company's 2000 Stock Option Plan.

     The  potential  realizable  value  amounts  in  the last two columns of the
following  chart  represent  hypothetical  gains  that could be achieved for the
respective  options  if  exercised at the end of the option term. The assumed 5%
and  10%  annual rates of stock price appreciation from the date of grant to the
end  of  the option term are provided in accordance with rules of the SEC and do
not  represent  the  Company's estimate or projection of the future common stock
price.  Actual  gains,  if  any,  on stock option exercises are dependent on the
future  performance  of  the  common  stock,  overall  market conditions and the
option holder's continued employment through the vesting period.

                                       8


                       Option Grants in Last Fiscal Year


                                                 Individual Grants
                              -------------------------------------------------------
                                Number of     % of Total                                 Potential Realized Value at
                               Securities       Options                                    Assumed Annual Rates of
                               Underlying     Granted to                                Stock Price Appreciation for
                                 Options       Employees     Exercise                            Option Term
                                 Granted       in Fiscal       Price      Expiration    -----------------------------
            Name                 (#)(1)         Year(2)       ($/Sh)         Date          5% ($)          10% ($)
---------------------------   ------------   ------------   ----------   ------------   ------------   --------------
                                                                                      
John D. Heaton ............     472,500           23.3%      $   5.70       6/17/10      $ 744,095      $ 1,644,256
John D. Heaton ............     100,000            4.9           7.03       8/19/10        194,226          429,189
Vincent J. Coates .........          --             --             --            --             --               --
Roger Ingalls Jr. .........      31,500            1.6           5.70       6/17/10         49,606          109,617
Paul B. Nolan .............          --             --             --            --             --               --

------------
 (1) All  options  granted  to the Named Officers in fiscal 2003 were granted at
     exercise  prices  equal  to  the  fair market value of the Company's common
     stock   on  the  dates  of  grant.  Historically,  options  granted  become
     exercisable  at the rate of 33% on the first anniversary date of the option
     grant  and  33%  of  the  option  shares  become exercisable each full year
     thereafter,  such  that  full  vesting occurs three years after the date of
     grant.  Options  lapse  after  7  years  or  90  days  after termination of
     employment.

 (2) Based  on 2,030,495 options granted during the fiscal year ended January 3,
     2004.

Aggregated  Option  Exercises  in  Last  Fiscal  Year and Fiscal Year-End Option
Values

     The  following  table  sets  forth  the  number  of  shares covered by both
exercisable  and  unexercisable stock options held by each of the Named Officers
at  December  31,  2003.  Roger  Ingalls  Jr.  was  the  only  Named Officer who
exercised stock options during fiscal 2003.


                                                             Number of Securities
                                                           Underlying Unexercisable       Value of Unexercised In-
                                                              Options at Fiscal             the-Money Options at
                                Shares         Value             Year-End (#)              Fiscal Year-End ($)(2)
                              Acquired on    Realized   ------------------------------  -----------------------------
            Name             Exercise (#)     ($)(1)     Exercisable    Unexercisable    Exercisable    Unexercisable
--------------------------- --------------  ----------  -------------  ---------------  -------------  --------------
                                                                                        
John D. Heaton ............          0       $     --            0              0          $ 50,000       $ 572,500
Vincent J. Coates .........         --             --           --             --                --              --
Roger Ingalls Jr. .........     19,000        156,887            0              0                 0          31,500
Paul B. Nolan .............          0             --       13,333          6,667            13,333          26,667

------------
 (1) The  value  realized  upon  exercise  is  (i)  the fair market value of the
     Company's  common  stock  on the date of exercise, less the option exercise
     price  per  share,  multiplied  by (ii) the number of shares underlying the
     options exercised.

 (2) The  value  of  unexercised  options  is  (i)  the fair market value of the
     Company's  common  stock  on December 31, 2003 ($14.71 per share), less the
     option  exercise  price  of  in-the-money  options,  multiplied by (ii) the
     number of shares underlying such options.

                                       9


Certain Transactions

     Pursuant  to  the  terms  of  an  agreement  dated  May 1, 1985 between the
Company  and  Vincent  J.  Coates, the Chairman of the Board of the Company, the
terms  of  which  were  then  amended  and  restated  in  August  1996 and again
effective  April  1998,  the  Company  is  obligated, in the event Mr. Coates is
required  to  resign  as  Chairman  of  the  Board  under certain circumstances,
including  a  change  of  control,  to continue to pay Mr. Coates his salary and
benefits for five years from the date of such resignation.

     In  April  1998,  the Company entered into an agreement with John D. Heaton
under  which  the  Company  agreed  to  pay  Mr.  Heaton his usual annual salary
(excluding  bonuses)  for a period of one year from the date that he is required
or  requested  for  any  reason  not involving good cause, including a change of
control,  to  involuntarily  relinquish  his positions with the Company as Chief
Executive  Officer,  President  and  Director.  If Mr. Heaton leaves the Company
voluntarily  or  if  he  is  asked to leave under certain circumstances, no such
severance payment is required.

     On  October  1, 2001, Mr. Heaton issued a promissory note to the Company in
the  principal  amount  of  approximately  $301,000 in a transaction designed to
provide  Mr.  Heaton  with funds to meet personal needs. The note bears interest
at  a  rate  of  6%  and shall become due and payable upon the earlier of (i) 90
days  after  the termination of Mr. Heaton's employment with the Company or (ii)
October 1, 2004.

Section 16(a) Beneficial Ownership Reporting Compliance

     Section  16(a) of the Securities Exchange Act of 1934, as amended, requires
the  Company's  executive  officers and directors, and persons who own more than
ten  percent  of  a registered class of the Company's equity securities, to file
reports  of  ownership  and  changes  in  ownership  with the SEC and the NASDAQ
National  Market.  Executive  officers,  directors  and greater than ten percent
shareholders  are required by SEC regulations to furnish the Company with copies
of  all  Section  16(a)  forms that they file. Based solely on its review of the
copies  of  such  forms  received  by it or written representations from certain
reporting  persons,  the Company believes that during fiscal 2003, its executive
officers,  directors and greater than ten percent shareholders complied with all
applicable filing requirements.

Shareholders Sharing an Address

     Shareholder  sharing  an  address with another shareholder may receive only
one  set  of  proxy materials to that address unless they have provided contrary
instructions.  Any  such  shareholder  who  wishes  to receive a separate set of
proxy  material  now or in the future may write or call the Company to request a
separate  set  of  these  materials.  Similarly, shareholders sharing an address
with  another  shareholder  who  have  received multiple copies of the Company's
proxy  material  may  write  or call the Company to request delivery of a single
copy of the materials.

                                       10


Report of the Audit Committee of the Board of Directors

     The  following  is  the  report  of  the  Audit  Committee  of the Board of
Directors  describing its review of materials and determinations with respect to
the  Company's  auditors  and  financial  statements  for  the fiscal year ended
January  3,  2004.  The information contained in this report shall not be deemed
to  be  "soliciting  material" or to be "filed" with the Securities and Exchange
Commission,  nor  shall  such  information be incorporated by reference into any
future  filing  under  the  Securities Act or Exchange Act, except to the extent
that the Company specifically incorporates it by reference into such filing.

     In  accordance  with its written charter adopted by the Board of Directors,
the   Audit   Committee  assists  the  Board  of  Directors  in  fulfilling  its
responsibility  for  oversight  of  the quality and integrity of the accounting,
auditing  and  financial  reporting  practices  of the Company. During 2003, the
Audit  Committee  met  (or  acted by written consent) eight times, and the Audit
Committee  chairman,  as  representative of the committee, discussed the interim
financial  information  contained  in  quarterly earnings announcements with the
Chief Financial Officer and independent auditors prior to public release.

     The  Audit  Committee  received  from  the Company's independent auditors a
formal  written statement, consistent with Independence Standards Board Standard
No.  1,  "Independence  Discussions  with Audit Committees," which describes all
relationships  between  the  auditors  and  the  Company  that, in the auditors'
professional  opinion,  might  reasonably  be  thought  to bear on the auditors'
independence.   The   Audit   Committee   discussed   with  the  auditors  these
relationships and satisfied itself as to the auditors' independence.

     The  Audit  Committee  also  discussed  and  reviewed  with the independent
auditors  all  communications required by generally accepted auditing standards,
including  those  described  in  Statement  on  Auditing  Standards  No.  61, as
amended,  "Communication with Audit Committees" and, with and without management
present,  discussed  and  reviewed  the  results  of  the  independent auditors'
examination of the Company's financial statements.

     Additionally,   the   Audit   Committee   reviewed  the  audited  financial
statements  of  the  Company as of and for the fiscal year ended January 3, 2004
with  management and the independent auditors. Management has the responsibility
for  the  preparation  of the Company's financial statements and the independent
auditors have the responsibility for the examination of those statements.

     Based  on  the  foregoing  review  and  discussions with management and the
independent  auditors,  the  Audit  Committee  recommended to the Board that the
Company's  audited financial statements be included in its Annual Report on Form
10-K  for  the  fiscal year ended January 3, 2004 for filing with the Securities
and   Exchange   Commission.   The   Audit   Committee   also   recommended  the
reappointment,  subject to shareholder approval, of the independent auditors and
the Board concurred in such recommendation.

Edmond R. Ward and William G. Oldham, on behalf of the Committee

                                       11


Report of the Compensation/Stock Option Committee of the Board of Directors

     The  following  is the report of the Compensation/Stock Option Committee of
the   Board   of  Directors  describing  compensation  policies  and  rationales
applicable  to  certain  of the Company's executive officers with respect to the
compensation  paid  to such executive officers for the fiscal year ended January
3,  2004.  The  information  contained  in such report shall not be deemed to be
"soliciting  material"  or  to  be  "filed"  with  the  Securities  and Exchange
Commission,  nor  shall  such  information be incorporated by reference into any
future  filing  under  the  Securities Act or Exchange Act, except to the extent
that the Company specifically incorporates it by reference into such filing.

     General.   The  Compensation/Stock  Option  Committee  is  responsible  for
making   recommendations  to  the  Board  of  Directors  with  respect  to  cash
compensation  levels  for  certain  of  the Company's executive officers. During
2003,   the   Compensation/Stock  Option  Committee  also  was  responsible  for
determining levels of equity-based compensation for the Company's employees.

     Compensation  Philosophy. The  Compensation/Stock  Option  Committee  makes
recommendations  as  to  the  salaries  of  certain of the executive officers by
considering  (i)  the  salaries  of  executive  officers in similar positions at
comparably-sized  peer  companies, (ii) the Company's financial performance over
the  past  year  based  upon  revenues  and  operating  results  and  (iii)  the
achievement  of individual performance goals related to each executive officer's
duties  and  areas  of  responsibility.  The Compensation/Stock Option Committee
makes  recommendations  as  to  the levels of cash bonuses awarded to certain of
the  Company's  executive  officers  and views such bonuses as being an integral
part  of  its  performance based compensation program. Such bonuses are based on
Company profits and are determined as a percentage of the officer's salaries.

     Equity-Based  Compensation. The  Compensation/Stock  Option Committee views
stock   options  as  an  important  part  of  its  long-term,  performance-based
compensation  program.  The  Compensation/Stock  Option  Committee  grants stock
options  to  all  employees of the Company under the Company's 2000 Stock Option
Plan  and  2002  Nonstatutory  Stock  Option  Plan  based  upon  the committee's
estimation   of  each  employee's  contribution  to  the  long-term  growth  and
profitability  of the Company. The 2000 Stock Option Plan is intended to provide
additional  incentives  to the executive officers to maximize shareholder value.
Options  are  granted under the 2000 Stock Option Plan and the 2002 Nonstatutory
Stock  Option Plan at the then-current market price and are generally subject to
three-year  vesting  periods  to  encourage  key  employees  to  remain with the
Company.

     Compensation   of   the   President   and   Chief   Executive  Officer. The
compensation  of  the  Company's President and Chief Executive Officer was based
upon  the  same  criteria  described  above.  Due  to  economic  conditions, the
Compensation/Stock  Option Committee felt that an increase to the base salary of
the  President  and  CEO  would  not be appropriate. Additionally, no management
bonuses, which are based on profits, were paid in 2003.

Edmond R. Ward, on behalf of the Committee

                                       12


Performance Graph

     Set  forth  below  is  a  total  return  line  graph  comparing  the annual
percentage  change in the cumulative return to the shareholders of the Company's
Common  Stock  with  the  cumulative return of the NASDAQ Stock Market Index and
the  RDG Technology Composite Index for the period commencing on January 1, 1999
and  ending  on  December  31,  2003.  The  results  are  shown  based on a $100
investment in the stock or index with any dividends reinvested.

     The  information  contained in the performance graph shall not be deemed to
be  "soliciting  material"  or  to  be  "filed" with the Securities and Exchange
Commission,  nor  shall  such  information be incorporated by reference into any
future  filing  under  the  Securities Act or Exchange Act, except to the extent
that the Company specifically incorporates it by reference into such filing.

                 COMPARISON OF 5-YEAR CUMULATIVE TOTAL RETURN*
       AMONG NANOMETRICS INCORPORATED, NASDAQ STOCK MARKET (U.S.) INDEX
                    AND THE RDG TECHNOLOGY COMPOSITE INDEX

[The following  descriptive  data is supplied in accordance  with Rule 304(d) of
Regulation S-T]

* $100  invested  on  12/31/98  in  stock  or  index-including  reinvestment  of
dividends.



                                                                   Cumulative Total Return
                                       --------------------------------------------------------------------------------
                                          12/98         12/99         12/00         12/01         12/02        12/03
                                       -----------   -----------   -----------   -----------   ----------   -----------
                                                                                            
NANOMETRICS INCORPORATED ...........     100.00        257.60        176.81        248.32        53.63        188.29
NASDAQ STOCK MARKET (U.S.) .........     100.00        192.96        128.98         67.61        62.17         87.61
RDG TECHNOLOGY COMPOSITE ...........     100.00        157.96        117.38        104.39        76.77        104.01


                                       13


                                PROPOSAL NO. 2

                        RATIFICATION OF APPOINTMENT OF
                             INDEPENDENT AUDITORS

     The  Board  has  appointed  Deloitte & Touche LLP, independent auditors, to
audit  the  consolidated financial statements of the Company for the fiscal year
ending  January  1,  2005.  Deloitte  &  Touche  LLP  has  audited the Company's
financial statements since fiscal 1991.

     Representatives  of Deloitte & Touche LLP are expected to be present at the
Annual  Meeting  with  the  opportunity to make a statement if they desire to do
so, and are also expected to be available to respond to appropriate questions.

Audit Fees

     The  aggregate audit fees billed by Deloitte & Touche LLP, the member firms
of  Deloitte  Touche  Tohmatsu,  and  their respective affiliates (collectively,
"Deloitte  &  Touche")  were  $263,680  and  $264,239 for the fiscal years ended
January  3,  2004  and  December 28, 2002, respectively. Fees for audit services
consisted  of  audits of the Company's annual consolidated financial statements,
reviews  of  the  Company's quarterly financial statements, statutory audits and
consents related to Securities and Exchange Commission filings.

Audit-Related Fees

     No  audit  related  services  were  provided  during the fiscal years ended
January 3, 2004 and December 28, 2002.

Tax Fees

     The  aggregate  tax  fees  billed  by  Deloitte  & Touche were $127,690 and
$222,255  for  the  fiscal  years  ended  January 3, 2004 and December 28, 2002,
respectively.  Fees  for  tax services consisted of Federal and state income tax
return  assistance,  assistance  with  tax  return  filings  in  certain foreign
jurisdictions, and transfer pricing documentation.

All Other Fees

     Fees  for all other services billed during the fiscal year ended January 3,
2004  were  $7,500  and consisted of training on the requirements of Section 404
of  the  Sarbanes-Oxley  Act.  No services other than those described above were
provided for the fiscal year ended December 28, 2002.

     In  considering  the  nature  of  the  services provided by the independent
auditor,  the  Audit Committee determined that such services are compatible with
the  provision  of  independent  audit  services.  The Audit Committee discussed
these  services with the independent auditor and Company management to determine
that  they  are  permitted  under  the  rules and regulations concerning auditor
independence  promulgated  by  the  U.S. Securities and Exchange Commission (the
"SEC")  to  implement  the  Sarbanes-Oxley  Act of 2002, as well as the American
Institute of Certified Public Accountants.

Audit Committee Pre-Approval Policy

     Pursuant   to  the  Audit  Committee  Charter,  the  Audit  Committee  must
pre-approve  all audit and non-audit services, and the related fees, provided to
the  Company  by  our  independent  auditors,  or subsequently approve non-audit
services  in  those  circumstances  where a subsequent approval is necessary and
permissible  under  the  Securities  Exchange  Act  of  1934 or the rules of the
Securities   and   Exchange   Commission.   Accordingly,   the  Audit  Committee
pre-approved  all  services  and  fees  provided by Deloitte & Touche during the
year  ended  January  3,  2004  and  has  concluded  that the provision of these
services is compatible with the accountant's independence.

     THE  BOARD OF DIRECTORS UNANIMOUSLY RECOMMENDS THAT SHAREHOLDERS VOTE "FOR"
THE  RATIFICATION  OF  THE APPOINTMENT OF DELOITTE & TOUCHE LLP AS THE COMPANY'S
INDEPENDENT AUDITORS FOR THE FISCAL YEAR ENDING JANUARY 1, 2005.

                                       14


                                 OTHER MATTERS

     The  Company  knows  of  no  other  matters  to  be submitted to the Annual
Meeting.  If  any  other  matters properly come before the Annual Meeting, it is
the  intention  of  the  persons  named  in  the enclosed proxy card to vote the
shares they represent as the Board of Directors may recommend.


                                        THE BOARD OF DIRECTORS


Dated: April 23, 2004

                                       15


                                   Appendix


                            Audit Committee Charter




                        CHARTER FOR THE AUDIT COMMITTEE
                           OF THE BOARD OF DIRECTORS
                                      OF
                           NANOMETRICS INCORPORATED

           (as approved by the Audit Committee on November 18, 2003)

PURPOSE

     The  purpose  of  the  Audit  Committee  (the  "Committee") of the Board of
Directors  (the "Board") of Nanometrics Incorporated (the "Company") shall be to
oversee  the  Company's accounting practices, system of internal controls, audit
processes, and financial reporting processes.

     The  Committee  has  the  authority  to  undertake  the specific duties and
responsibilities  listed  below  and  will  have the authority to undertake such
other specific duties as the Board from time to time prescribes.

MEMBERSHIP

     The  members  of  the Committee will be nominated by, will be appointed by,
and  will  serve  at the discretion of, the Board. The Committee will consist of
at  least  three  (3)  members  of the Board who meet the following criteria (in
each  case  to  the  extent  that  such  requirements are effective from time to
time):

     1.  Each member will be an  independent  director  in  accordance  with the
         rules of the Nasdaq  National  Market  ("Nasdaq")  and the rules of the
         Securities and Exchange Commission ("SEC");

     2.  Each member will be able to read and understand  fundamental  financial
         statements, in accordance with the rules of Nasdaq;

     3.  At least one member will have past employment  experience in finance or
         accounting,  requisite professional certification in accounting, or any
         other  comparable   experience  or  background  which  results  in  the
         individual's financial sophistication, including being or having been a
         chief  executive  officer,  chief  financial  officer  or other  senior
         officer with financial oversight  responsibilities,  in accordance with
         the rules of Nasdaq; and

     4.  At least one member will be a "financial expert" in accordance with the
         rules of Nasdaq and the rules of the SEC.

     The  Board  shall  designate one member of the Committee as the Committee's
Chairperson.

RESPONSIBILITIES AND AUTHORITY
     The responsibilities and authority of the Committee shall include:

Processes, Controls and Risk Management

        1. Reviewing  periodically  the  Company's financial reporting processes
   and  disclosure  controls  and  processes,  based  on  consultation  with the
   Company's management and independent auditors;

        2. Reviewing   periodically   the  adequacy  and  effectiveness  of  the
   Company's   internal   control   policies   and   procedures,  including  the
   responsibilities,  budget  and  staffing  of  the  Company's  internal  audit
   function,   based   on   consultation   with  the  Company's  management  and
   independent auditors;

        3. Reviewing  the reports prepared by management, and attested to by the
   Company's  independent  auditors, assessing the adequacy and effectiveness of
   the  Company's  internal  controls  and procedures, prior to the inclusion of
   such  reports  in  the Company's periodic filings as required under the rules
   of the SEC;

                                      A-1


        4. Discussing  guidelines  and  policies  governing the process by which
   management  and  other  persons  responsible  for  risk management assess and
   manage  the  Company's  exposure  to  risk,  as  well  as the Company's major
   financial  risk  exposures  and the steps management has taken to monitor and
   control  such  exposures, based on consultation with the Company's management
   and independent auditors;

Independent Auditors

        5. Appointing,  approving the compensation of and overseeing the work of
   the  Company's  independent  auditors;  in  this  regard, the Committee shall
   have  the  sole authority to approve the hiring and firing of the independent
   auditors   and   the  independent  auditors  shall  report  directly  to  the
   Committee;

        6. Pre-approving  audit  and  permissible non-audit services provided to
   the   Company   by   the  independent  auditors  (or  subsequently  approving
   non-audit  services  in  those  circumstances  where a subsequent approval is
   permissible);

        7. Discussing  with  the  Company's independent auditors the independent
   auditors'  annual  audit  plan,  including  the scope of audit activities and
   all  critical  accounting  policies  and  practices to be used, and any other
   matters  required  to  be  discussed  by Statement on Accounting Standard No.
   61, as it may be modified or supplemented;

        8. Obtaining  and  reviewing at least annually a report by the Company's
   independent auditors describing:

   * The independent auditors' internal quality-control procedures;

   * Any  material  issues  raised  by  the most recent internal quality-control
     review,  or  peer review, of the independent auditors, or by any inquiry or
     investigation  by  any  governmental  or professional authority, within the
     preceding  five  years,  respecting  one or more independent audits carried
     out  by the independent auditors, and any steps taken to deal with any such
     issues; and

   * A  formal  written  statement  delineating  all  relationships  between the
     auditor  and  the  Company,  consistent  with  Independent  Standards Board
     Standard  No.  1,  as it may be modified or supplemented, and reviewing and
     discussing  with  the auditors any disclosed relationships or services that
     may  impact  the  objectivity  and  independence  of  the auditors; in this
     regard,  the  Committee  shall  recommend  that  the Board take appropriate
     action, if necessary, to ensure the independence of the auditors;

        9. Reviewing  periodically  with  management,  the Company's independent
   auditors  and  the  internal  auditors  (or other persons responsible for the
   Company's internal audit function):

   * The  results  of the annual audit of the Company, including any significant
     findings,  comments  or  recommendations  of  the  independent auditors and
     internal  auditors (or other persons responsible for the Company's internal
     audit function) together with management's responses thereto; and

   * Any  significant  changes  in  the  Company's  accounting principles or the
     methods of applying the Company's accounting principles;

       10. Reviewing  periodically with the independent auditors any problems or
   difficulties  encountered  by  the  independent auditors in the course of any
   audit  work,  including  management's  response  thereto, any restrictions on
   the  scope  of the independent auditor's activities or on access to requested
   information, and any significant disagreements with management;

SEC Reports and Other Disclosure

       11. Reviewing with:

   * Management  and  the  Company's  independent  auditors, before release, the
     audited  financial  statements  and unaudited interim financial statements;
     and

   * Management,   before  release,  the  Company's  earnings  announcements  or
     financial  releases  and Management's Discussion and Analysis (MD&A) in the
     Company's annual report on Form 10-K and quarterly reports on Form 10-Q;

                                      A-2


       12. Directing  the  Company's  independent  auditors  to  review,  before
   filing  with  the SEC, the Company's interim financial statements included in
   quarterly  reports  on Form 10-Q, using professional standards and procedures
   for conducting such reviews;

       13. Overseeing  compliance  with  the disclosure requirements of the SEC,
   including  disclosure  of  information regarding auditors' services and audit
   committee members, member qualifications and activities;

Other Responsibilities and Authority

       14. Establishing  procedures  for the receipt, retention and treatment of
   complaints   received   by   the   Company   regarding  accounting,  internal
   accounting  controls  or  auditing  matters,  and the confidential, anonymous
   submission  by  employees  of  the Company of concerns regarding questionable
   accounting or auditing matters;

       15. Reviewing  and approving all related party transactions in accordance
   with the rules of Nasdaq;

       16. Reviewing,  approving and monitoring the Company's code of ethics for
   senior financial officers;

       17. Establishing  hiring  policies  regarding employment of employees, or
   former employees, of the Company's independent auditors;

       18. Reviewing  the  Committee's  own  charter,  structure,  processes and
   membership requirements; and

       19. Performing such other duties as may be requested by the Board.

INVESTIGATIONS, STUDIES AND OUTSIDE ADVISORS

     The  Committee  may  conduct or authorize investigations into or studies of
matters  within  the Committee's scope of responsibility with full access to all
books, records, facilities and personnel of the Company.

     As  appropriate,  the  Committee  will  obtain  advice  and assistance from
outside legal, accounting or other advisors at the Company's expense.

MEETINGS
     The  Committee  will  establish its own schedule and will meet at least one
(1) time each fiscal quarter.

     The   Committee   will  meet  separately  with  members  of  the  Company's
management,  internal  auditors  (or other persons responsible for the Company's
internal  audit  function)  and the Company's independent auditors at such times
as the Committee deems appropriate.

     The  Committee may request that any directors, officers or employees of the
Company,  or other persons whose advice and counsel are sought by the Committee,
attend  any  meeting  of  the Committee to provide such pertinent information as
the Committee requests.

MINUTES

     The  Committee will maintain written minutes of its meetings, which minutes
will be filed with the minutes of the meetings of the Board.

                                      A-3


REPORTS

     The  Committee  shall  prepare  all  reports required to be included in the
Company's  filings  with  the SEC, pursuant to and in accordance with applicable
rules of the SEC.

     The  Committee  also  shall  report  regularly to the full Board, including
with  respect  to any issues that arise with respect to the quality or integrity
of  the  Company's  financial  statements,  the  effectiveness  of the Company's
internal  controls  or  disclosure controls, the performance and independence of
the  Company's  independent  auditors,  or  any  other  issue that the Committee
believes  should be brought to the attention of the full Board. Such reports may
be made orally or in writing.

COMPENSATION

     Members  of  the  Committee  shall  receive  such  fees,  if any, for their
service  as  Committee  members as may be determined by the Board. Such fees may
include  retainers  or  per  meeting  fees  and  shall  be  paid in such form of
consideration as is determined by the Board.

     Members  of the Committee may not receive any compensation from the Company
except  the  fees  that they receive for service as a member of the Board or any
committee thereof.

DELEGATION OF AUTHORITY

     The  Committee may, to the extent permitted under applicable law, the rules
of  Nasdaq  and the SEC, and the Company's Articles of Incorporation and Bylaws,
delegate  to  one  or  more designated members of the Committee the authority to
pre-approve  audit  and  permissible  non-audit  services,  provided  that  such
pre-approval  decision  is  presented  to  the  full  Committee  at  a scheduled
meeting.

                                      A-4


                            NANOMETRICS INCORPORATED

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                       2004 ANNUAL MEETING OF SHAREHOLDERS
                                  May 26, 2004

     The undersigned  shareholder(s) of Nanometrics  Incorporated,  a California
corporation,  hereby  acknowledges  receipt of the  Notice of Annual  Meeting of
Shareholders and Proxy Statement, each dated April 23, 2004, and hereby appoints
Vincent  J.  Coates  and  Paul  B.  Nolan,   and  each  of  them,   Proxies  and
Attorneys-in-Fact, with full power to each of substitution, on behalf and in the
name of the undersigned, to represent the undersigned at the 2004 Annual Meeting
of  Shareholders of Nanometrics  Incorporated  to be held on Wednesday,  May 26,
2004 at 1:30 p.m.,  local time, at the principal  offices of the Company located
at 1550  Buckeye  Drive,  Milpitas,  California,  95035 and at any  adjournments
thereof,  and to vote all  shares  of Common  Stock  which  the  undersigned  is
entitled to vote on the matters set forth below:

ITEM 1.   Election of Directors:

     ( )    FOR all nominees listed below (except as indicated)

     ( )    WITHHOLD AUTHORITY to vote for all nominees listed below

IF YOU WISH TO WITHHOLD AUTHORITY TO VOTE FOR ANY INDIVIDUAL  NOMINEE,  STRIKE A
LINE THROUGH THAT NOMINEE'S NAME IN THE LIST BELOW:

         Vincent J. Coates      J. Thomas Bentley       John D. Heaton

Stephen J Smith        Edmond R. Ward      William G. Oldham      Mircea V. Dusa

ITEM 2.   Proposal  to  Ratify  the  Appointment  of  Deloitte  & Touche  LLP as
          Independent Auditors of the Company for the 2004 Fiscal Year:

          ( ) FOR                 ( ) AGAINST                ( ) ABSTAIN

(Continued and to be signed, on reverse side)



(Continued from other side)

     In their  discretion,  the Proxies are  authorized  to vote upon such other
business as may properly come before the meeting.

     THIS  BALLOT  WILL BE VOTED AS DIRECTED  OR, IF NO  CONTRARY  DIRECTION  IS
INDICATED, WILL BE VOTED "FOR" THE ELECTION OF DIRECTORS NAMED HEREIN, "FOR" THE
PROPOSAL LISTED, AND AS SAID PROXIES DEEM ADVISABLE ON SUCH OTHER MATTERS AS MAY
COME BEFORE THE MEETING.


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              Typed or Printed Name(s)


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              Signature


              ------------------------------------------------------------------
              Signature


              ------------------------------------------------------------------
              Title, if applicable


              ------------------------------------------------------------------
              Type and Number of Shares owned

              Dated:                                  , 2004
                     ---------------------------------

THIS PROXY SHOULD BE MARKED, DATED, SIGNED BY THE SHAREHOLDER(S)  EXACTLY AS HIS
OR HER NAME  APPEARS  HEREON AND  RETURNED  PROMPTLY IN THE  ENCLOSED  ENVELOPE.
PERSONS SIGNING IN A FIDUCIARY  CAPACITY SHOULD SO INDICATE.  IF SHARES ARE HELD
BY JOINT TENANTS OR AS COMMUNITY PROPERTY, BOTH SHOULD SIGN.